Project Description:
This project is part of the National Natural Science Foundation Joint Fund and focuses on capacitive micro-acceleration sensors. Addressing the stability issues of the device under high and low-temperature experiments and long-term storage conditions, the research explores the mechanisms by which packaging affects stability. Based on the characteristics of encapsulant materials and the mechanical behavior of the packaging process, the study aims to elucidate the relationship between the stability of micro-accelerometers and the material properties, curing process, and structural parameters of the encapsulant. Furthermore, an optimized structural design for highly stable micro-accelerometer sensing units is proposed.
Application Fields:
This device can be applied in areas such as inertial navigation for aircraft, posture and position control of intelligent robots, and automotive safety systems.
Performance Advantages:
The stability parameters of the device have reached an internationally top-tier level.
